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SEMI F104-0312 (technical revision)
SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment
Clear and commonly accepted definitions are needed for efficient communication and to prevent misunderstanding between buyers and vendors of metrology equipment and manufacturing services
This Guide contains definitions of terms and procedures for determining the leak rates of MFCs as used in the semiconductor industry
for both front opening shipping box (FOSB) labels and bag labels
P00600 - SEMI P6 - フォトマスク用レジストレーションマーク Revision:SEMI P6-88 (Reapproved 0707) - Inactive SEMI F104-0312 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2007425global Audits and Reviews Subcommittee20076www. semi. org1988 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.
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